Permalink to Imec readies High-NA EUV scanner for first wafers
发布时间:2024年6月5日 12:43
Author电子周刊
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“The first High-NA EUV scanner has been assembled by ASML and the first wafers will be exposed soon,” says Steven Scheer, senior vice president of Advanced Patterning, Process and Materials at imec, “in the next few months, the joint imec-ASML High-NA EUV Lab will be operational, and access will be provided to the High-NA customers.”
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