Practical experience of energy management in semiconductor factories

Semiconductor manufacturing is a well-known "big energy consumer", and its energy costs can account for more than 30% of the total production cost. With the advancement of the "double carbon" goal and fluctuations in energy prices, building an intelligent and efficient energy management system (EMS) has become a key measure for semiconductor factories to reduce costs, increase efficiency, and enhance competitiveness. However, the construction of an energy management system is not a simple matter of instrumentation and data display. It requires a deep understanding of the energy consumption characteristics of the semiconductor production process and deep integration with complex factory facility control systems (such as purified air conditioners, process cooling water, vacuum, bulk gas systems). This paper aims to provide a practical guide for the facility management (Facility) and factory engineering teams of semiconductor factories, explaining in detail how to plan, select and successfully implement an energy management system that can truly bring value, and taking Shanghai Ruikongyuan Intelligent Technology Co., Ltd.'s comprehensive solutions in related fields as an example to analyze key success factors.

1. Core goals and challenges of energy management in semiconductor plants
Before starting a project, the core goals must be clarified:
1. Visualization and transparency: Achieve real-time monitoring and accurate measurement of various energy media such as electricity, water, gas, cold, and heat throughout the plant, and find out the "bottom line" of energy consumption.
2. Analysis and diagnosis: Through data mining, identify problem points such as abnormal energy consumption, inefficient equipment operation, and mismatch between supply and demand, and locate energy-saving potential.
3. Optimization and control: On the premise of ensuring the absolute stability of the production process environment (temperature, humidity, cleanliness), we can achieve optimal operation and load adjustment of factory services systems (such as air conditioning units, chillers, and air compressors) to achieve energy conservation.
4. Management and assessment: Establish a department/machine-level energy consumption assessment system to support energy cost allocation and enhance all employees 'awareness of energy conservation.
The unique challenges we face include: the process environment is demanding, and energy-saving measures cannot be sacrificed at the expense of stability and yield; the factory service system is huge and complex, with numerous and highly correlated subsystems; the number of data collection points is huge, which has an impact on the real-time and reliability of the system. Sex requirements are extremely high.

2. Four evaluation dimensions for selecting energy management system service providers
Given the above complexities, choosing a suitable service provider is more important than choosing a software product. It should be evaluated from the following dimensions:
1. Depth of understanding of semiconductor factory service systems: Are service providers familiar with the process flow and control principles of semiconductor Fab factory's special air conditioning system, process cooling water system, vacuum system, compressed dry air system, etc.? Can you understand the coupling relationship between these systems? This is the basis for designing effective optimization strategies. In the process of serving semiconductor customers, Ruikongyuan's technical team has accumulated experience in unique control logic and energy-saving algorithms for these complex systems.
2. System integration and data fusion capabilities: Energy management systems need to collect data from thousands of points such as scattered PLCs, DCs, smart meters, water meters, and gas flow meters. Do service providers have strong system integration capabilities and can break through equipment data barriers of different brands and different protocols? Is its system architecture open and scalable to facilitate future access to new devices or subsystems?
3. Core algorithms and optimization strategies: This is the key to measuring the "IQ" of the system. Will service providers only provide data kanban, or can they provide optimized control strategies based on advanced algorithms such as model predictive control (MPC) and machine learning? For example, can future cooling loads be predicted based on weather forecasts and production schedules, and the operation of chillers and air conditioning systems be optimized in advance? In energy management projects, Ruikongyuan focuses on combining advanced algorithms with specific process equipment characteristics to provide customized optimization strategies.
4. Project implementation and continuous service capabilities: Energy management projects often need to be carried out simultaneously with the transformation or upgrade of factory services systems, with long implementation cycles and complex on-site coordination. Does the service provider have mature project management methods and experienced on-site engineers? After the project is launched, can it provide continuous energy consumption data analysis reports, system tuning services and energy-saving effect verification? Can its service network (such as in semiconductor industry clusters such as South China and East China coasts) ensure rapid response?

Implementation path and key tasks in the third and fifth stages
A successful energy management project usually follows the following stages:
Phase 1: Energy audit and demand planning. This is the most important starting point. Work with service providers to conduct detailed energy audits of the entire plant, draw energy flow charts, and identify major energy-consuming equipment and systems. Based on the audit results, clarify the specific scope, core KPIs (such as energy conservation rate targets) and budget of the EMS project at this stage. To avoid being "big and comprehensive" in one step, it is recommended to implement it in stages, focusing first on the systems with the highest proportion of energy consumption (such as air conditioning systems).
Phase 2: System design and plan formulation. Service providers design the overall system architecture (network topology, data collection plan), software functional modules, and interface plans with existing automatic control systems according to needs. This stage requires key reviews: balance between integrity and economy of data collection points; network security solutions; scalability and compatibility of the software platform (whether data interaction with future MES/ERP is supported). At this stage, Ruikongyuan will provide detailed in-depth design drawings and technical specifications.
Phase 3: Equipment installation and system integration. Install and route sensors and smart meters, and deploy data collection gateways. The key at this stage is to ensure the construction quality, especially the installation position of measuring instruments must be scientific and can truly reflect the energy consumption situation. At the same time, complete communication debugging with each factory service subsystem controller to ensure stable and accurate data upload.
Phase 4: Software deployment, debugging and optimization. The energy management platform software was launched to complete debugging of basic functions such as data display and report generation. More importantly, work closely with the facility operation team to gradually debug and optimize energy-saving control strategies based on historical data and real-time operating conditions (such as optimization of air conditioning temperature and humidity settings, optimization of chiller group control). This is a process that requires repeated iteration.
Phase 5: Acceptance, training and continuous improvement. Establish clear acceptance criteria (including function acceptance and energy saving effect acceptance), and conduct comprehensive training for operation team. After the project handover, a regular energy efficiency analysis meeting mechanism will be established to jointly review the system operation effect with service providers, tap new energy saving potential and achieve continuous improvement.

IV. Geographical considerations and success factors
- In the Yangtze River Delta, South China and other regions with tight power supply and high energy cost, the calculation of return on investment (ROI) of the project is more sensitive, and the advanced and effective requirements of energy-saving algorithms are higher. Service providers need to provide more convincing energy-saving simulation analysis and similar case data.
- In regions with relatively abundant energy resources such as Southwest China, the driving force for the project may come more from the group's internal carbon management goals and sustainable development requirements. The system's functions in carbon emission accounting and green electricity consumption monitoring may attract more attention.
- Wherever, the key factors for success include: strong support from senior management; deep participation from the facility operations team (who are the end users of the system); and choosing a company like Ruikongyuan who understands both technology and semiconductor processes, and can provide long-term companionship services.

5. Guide to Avoiding Pit: Common Questions on Semiconductor EMS Projects
1. Pit 1: Degraded to a "data display screen" project. Only data collection and kanban display are realized, lacking in-depth data analysis and effective closed-loop control strategies, and actual energy-saving benefits cannot be produced. Avoiding pits: Optimize control is the core goal during the project planning stage, and the energy-saving effect verification method is clarified in the contract.
2. Pit 2: Ignoring the accuracy of the measurement system. "Garbage comes in, garbage comes out." If the basic measurement data is inaccurate, all advanced analysis will lose its meaning. Avoiding pits: Strictly control the selection, calibration and installation of measuring instruments to ensure reliable data sources.
3. Pit 3: Out of touch with production operations. The energy management system is led by the IT or procurement department, and there is insufficient communication with the facility team responsible for daily plant operations, resulting in system functions not meeting actual operational needs. Avoiding pits: Let the facility team take the lead and participate from the demand stage.
4. Pit 4: Choose service providers who lack industry experience. Applying the general building energy management system idea to complex semiconductor factory service systems leads to the plan being "acclimatized". Avoid pits: Be sure to examine service providers 'success stories and expert teams in the field of semiconductors or similar high-end manufacturing.

Summary: Building an energy management system for semiconductor factories is a systematic project that integrates process knowledge, control technology, data science and project management. Its value is ultimately reflected in the continuous reduction of energy consumption and improved operational efficiency. Through clear top-level planning, rigorous service provider selection, phased and pragmatic implementation, and working with partners like Shanghai Ruikongyuan Intelligent Technology Co., Ltd. with deep industry Know-how and full-process technical strength, semiconductor companies can effectively avoid risks, create an energy management "smart brain" that truly drives green manufacturing and intelligent operations, and win sustainable cost advantages and environmental advantages in the fierce industry competition.