Unveiling the energy management system of semiconductor factory

Semiconductor manufacturing is well-known as the "electric tiger" and "water tiger", and the energy consumption of its factory (FAB) is extremely alarming. For an advanced fab, the power costs may account for 20%-30% of the total operating costs. Against the background of the national strategy of "carbon peaking and carbon neutrality" and the increasing requirements for green manufacturing in global supply chains, how to achieve energy conservation and consumption reduction, reduce production costs, and improve corporate ESG performance through effective energy management systems (EMS) has become the focus of attention of domestic business managers in semiconductor industry clusters from the Yangtze River Delta to South China and Central China. This article will deeply analyze the core values, key technologies and implementation paths of the semiconductor factory's energy management system, and take the practice of Shanghai Ruikongyuan Intelligent Technology Co., Ltd. as an example to show how professional service providers can help semiconductor companies win this "energy consumption battle".

**"Pain Points" of Energy Consumption in Semiconductor Factory and "Value Points" of EMS **
The energy consumption of semiconductor factories is mainly concentrated on process equipment (such as lithography machines and etching machines), clean room air conditioning systems (FFU, MAU, Dry Coil), ultrapure water systems, vacuum systems, exhaust gas treatment systems, and lighting power. Its energy consumption pain points are as follows: 1) The number and variety of energy-using equipment is huge, energy consumption is difficult to measure, and "black box" operations are too many;2) The linkage between process equipment and factory facilities is insufficient, and there is an extensive model of "fully opening factory services during process production";3) There is a lack of in-depth analysis and optimization methods based on data, energy conservation relies on experience, and the effect is unsustainable.

The value of an advanced energy management system goes far beyond "looking at" energy consumption data, but also in "managing" and "controlling". Through the closed loop of "monitoring-analysis-optimization-control", it can achieve: ** Visualize the energy consumption portrait **, making the whereabouts of every kilowatt of electricity and every ton of water clearly visible;** Locate energy consumption abnormalities and loopholes **, quickly discover running leaks and inefficient equipment;** Support refined management and performance appraisal **, decompose energy consumption indicators into workshops, teams and even single equipment;** Achieve predictive and optimal control **, dynamically adjust the operation of the factory service system through algorithmic models to maximize energy efficiency while meeting strict production environment requirements.

** Three key technology levels implemented by EMS in semiconductor factories **
1. ** Comprehensive sensing and reliable transmission layer: ** This is the "sensory nerve" of EMS. It is necessary to deploy smart meters, water meters, flow meters, temperature and humidity sensors, etc. at key energy-consuming nodes such as power distribution systems, air compressor stations, ice water hosts, cooling towers, pure water stations, and process exhaust, and use industrial Ethernet. Stable and reliable network architectures such as ring networks upload data in real time. During implementation, Ruikongyuan pays special attention to the rationality of measurement point planning and the accuracy of sensor selection to ensure the authenticity and reliability of basic data and lay the foundation for upper-level analysis.

2. ** Data integration and intelligent analysis layer: ** This is the "brain" of EMS. The system needs to clean, integrate and store massive heterogeneous data from different subsystems and different protocols (such as Modbus, BACnet, OPC), and build a unique energy consumption analysis model for semiconductor factories. For example, calculate energy consumption per unit of product (UPW), analyze the efficiency curve of air conditioning systems with outdoor weather and production capacity load, and establish an energy efficiency benchmark (Baseline) for major energy-consuming equipment. Ruikongyuan uses its data platform and industry knowledge base to customize and develop key energy efficiency indicator (KPI) kanbans for customers, and automatically generates energy consumption diagnostic reports through trend analysis, comparative analysis, regression analysis and other tools to transform data into insights.

3. ** Optimize control and closed-loop execution layer: ** This is the "hands and feet" of EMS to produce actual energy-saving benefits. Based on the insights of the analysis layer, the system can automatically or assist manual issuance of optimization instructions. For example: dynamically predict the cooling load according to the next day's production plan and weather forecast, optimize the start-stop combination and operating parameters of the ice water main engine, water pump, and cooling tower (chilled water supply temperature setting); automatically adjust the area lighting and FFU wind speed according to the actual occupancy (personnel presence) in the clean room; realize intelligent joint control of the air compressor group according to the main pipe pressure demand, avoiding "big horse-drawn carriages". The core advantage of Ruikongyuan lies in its "self-control" gene, which can directly write energy management strategies into PLC or DDC controllers to achieve precise closed-loop control of factory equipment, allowing energy-saving strategies to move from "recommendation" to "automatic execution".

** Differentiated practice of Ruikongyuan EMS solutions **
Shanghai Ruikongyuan Intelligent Technology Co., Ltd. regards energy management as a natural extension and value sublimation of its automatic control system technical services. In providing services to a well-known semiconductor company in key northern areas, Ruikongyuan demonstrated its comprehensive strength:

- ** Full-process service: ** From the initial energy audit and solution design, to sensor and gateway installation, data platform deployment, control strategy programming and debugging, to later operation and maintenance training and continuous energy efficiency improvement consultation, it provides one-stop turnkey service.
- ** Deep system integration: ** Not only does it integrate energy consumption data of the Factory Services Monitoring System (FMCS), but it also obtains production capacity data of some production management systems (MES) through a safe isolation method, thereby accurately calculating energy consumption per unit of product and saving Energy is truly linked to production.
- ** Application of advanced algorithms: ** In the optimization of air conditioning systems, advanced algorithms such as model predictive control (MPC) are applied to replace traditional PID control, which improves the comprehensive energy efficiency (COP) of the entire cold water system by more than 15%.
- ** Drawing on globalization experience: ** Its project experience in overseas markets (such as Thailand) has brought international advanced energy management concepts and practices, combined with domestic and local conditions to form better solutions.

** From energy consumption management to value creation: Ruikongyuan's brand commitment **
For semiconductor companies, investing in energy management systems is no longer a simple "cost expenditure", but a "strategic investment" that focuses on long-term returns. It not only brings direct savings in electricity and water bills, but also creates multi-dimensional hidden value by improving equipment reliability, extending equipment life, ensuring the stability of the production environment, and meeting green supply chain audit requirements.

Shanghai Ruikongyuan Intelligent Technology Co., Ltd., with its deep technical accumulation in the field of automatic control, a deep understanding of semiconductor factory services systems, and a "technology + service" two-wheel drive model, is committed to becoming a semiconductor company to achieve green and intelligent manufacturing. The most reliable energy management partner on the road to transformation. The goal is to help each cooperative semiconductor factory transform energy consumption "pain points" into competitiveness "bright spots" through professional EMS solutions and gain opportunities on the road to sustainable development. Choosing Ruikongyuan means choosing a professional team that uses data and intelligent control technology to carefully calculate every penny of energy consumption for the company and create real value.